Oberkochen, Germany / Nacka, Sweden - Sweden-based provider of industrial productivity solutions Atlas Copco Group has acquired iTrap mass spectrometry technology from ZEISS. The business will become part of the Semiconductor Chamber Solutions Division in Atlas Copco’s Business Area Vacuum Technique.
iTrap, a technology for highly sensitive, real-time gas analysis, is used for process analytics and advanced process control in the semiconductor market. It can analyze and control important chemical processes in vacuum chambers of semiconductor manufacturing equipment and other applications. This is the first external sale of a ZEISS venture.
Atlas Copco will integrate iTrap in the Edwards business to synergize with other vacuum technology solutions of the worldwide market leader. At Edwards, the technology will benefit from a worldwide sales and service network as well as from innovation and application centers close to all relevant major customer sites worldwide.
Source : ZEISS